The Graphene Integrated Photonics is the next-generation photonic platform that enables high-performance optical devices.
Graphene is a 2D material grown through a Chemical Vapour Deposition process.
Graphene can be transferred onto a variety of dielectric substrates with a transfer process that preserves the ‘as grown’ carrier mobility.
Transfers on SiN or Si Photonics circuits permits the realization of active building blocks as high-speed Electro-Absorption Modulators, Phase Modulators, and Photodetectors.
INPHOTEC performs single-crystals and continuous film graphene growth integration through proprietary and protected processes including:
- CVD graphene growth process
- semi-dry transfer process
- hBN encapsulation process
- dielectric deposition process
- metallization process
Key equipment (installation available and planned):
- BM6 CVD system
- Semi-automated transfer tool
- Atomic Layer Deposition
- RIE system
- e-Beam
